21EC743 Fabrication Technology
Course Learning Objectives
● Familiarise with the concepts of different processes involved in fabrication process and also with packaging issues.
● Apply principles to identify and analyse the various steps for the fabrication of various components.
● Introduce the fundamental concepts relevant to VLSI fabrication.
● Enable the students to understand the various VLSI fabrication techniques.
SYLLABUS COPY
MODULE - 1
Crystal Growth and Wafer Preparation
Introduction, Electronic grade Silicon, Czochralski Crystal Growing, Silicon Shaping
Epitaxy
Introduction, Vapor-Phase Epitaxy
MODULE - 2
Epitaxy
Molecular beam epitaxy, Epitaxial evaluation
Oxidation
Introduction, Growth mechanism and kinetics, Thin oxides, oxidation techniques, oxide properties, redistribution of dopants, oxidation of polysilicon, oxidation-induced defects
MODULE - 3
Lithography
Introduction, Optical Lithography, Electron Lithography, X-ray lithography, Ion Lithography
MODULE - 4
Diffusion
Introduction, Models of diffusion in solids, fick’s 1D diffusion equation, atomic diffusion mechanism, Diffussivities, Measurement techniques, fast diffusants in silicon, diffusion in polycrystalline silicon, diffusion in SiO2
Ion Implantation
Introduction, Implantation equipment
MODULE - 5
Ion Implantation
Annealing, Shallow Junctions, High energy implantation
Metallization
Introduction, Metallization applications, metallization choices, Metallization problems, New role of metallization.
Course outcome
1. Understanding the process in the field of Fabrication technology.
2. Understand the properties and growth mechanism of oxidation.
3. Relate to the competing methods of various lithographic techniques and their limitations.
4. Analyse the diffusion profiles and models in various materials.
5. Describe the Metallization choices, properties and selection of optimum deposition process.
Suggested Learning Resources
Text Book
VLSI Technology, S M Sze, 2 edition, Mc Graw Hill.
Reference Books
1. VLSI Fabrication Principles, S K Gandhi, John Willey & Sons. 2. Micromachined transducer, G T A Kovacs, McGraw Hill.